FST introduces the MASS-VIEW® gas controller for controlling plasma gasses. MASS-VIEW® is produced by Bronkhorst Nederland BV. The MASS-VIEW® controller is one of the FST i products.
The new MASS-VIEW® flow meter series are a digital alternative to the conventional flow tubes or rotameters. The MASS-VIEW® flow meter incorporates a digital bar graph of actual gas flow which is, thanks to the OLED (organic light emitting diode) technology, clearly visible from all angles. It indicates flow units, gas type and totalised figures. With built-in needle valve for flow control duties it is designed to mimic the straightforward features of a flow tube or rotameter, yet with the considerable added benefits of an electronic output signal, high measuring accuracy, virtual independence from gas temperature and pressure variations, no fragile glass components in the flow path.
The MASS-VIEW® series operates on the principle of direct thermal mass flow measurement for gas flow ranges suitable for plasma processes.
It offers a standard accuracy rating of ± 2%RD if the flow is higher than 50% of its maximum full scale and ± (1%RD + 0.5%FS) on lower flows, handling pressures up to 10 bar (150 psi). Power consumption is low and mechanical process connections are fitted for straightforward flow tube or rotameter replacement. The MASS-VIEW® incorporates the latest OLED technology which gives a brighter readout than LCD’s, can be viewed from virtually any angle and has fast signal response times. Alarm settings and the selection of a pre-installed gas or pre-set range are accessed via a user-friendly menu, using a 4-way navigation button mounted on the front plate. An analog output signal enables data logging against various parameters and full accountability of gas flow, such as for shared ring main applications.
Features
- Clear indication in: - actual flow rate (bar graph and value) - desired flow units - type of gas - totalized flow
- Bright, wide-angle OLED display
- Freedom from parallax error
- Virtually independent of pressure and temperature variations
- Low pressure drop
- Wide flow ranges
- Fast response
- High accuracy
- Alarm and counter functions (2 alarm contacts available on meters)
- Analog (0..5 Vdc) and digital communication (Modbus-RTU, RS-232 interface)
- 7 pre-installed gases available (Air, N2, O2, Ar, CO2, CH4, C3H8) or H2 or He
- Digitally calibrated
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